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within the reticle, for a lateral offset of as much as 100 microns will cause an
error in radial distance of only 0.1 microns in the worst case. The amount of
parallactic error caused by the gap between the scale and the plate depends on
the effective focal length of the objective; for the B & L Macroscope, a 100
micron radial offset will cause an error of 0.3 microns in radial distance.
The image as seen within the reticle will lie between a pair of millimeter
graduations of the scale. The whole miilimeter reading is taken directly from the
lower graduation. To obtain the fractional reading, one rotates the micrometer
drum to translate the lower graduation until it precisely bisects the image. The
fractional reading is then made from the micrometer drum to the nearest half
micron. The reading is recorded against point number and the process is repeated
for all points of to be measured. When all of the measurements have been
performed for a given position of the plate, the measuring arm is moved out of
the way to a nearly horizontal position and the plate holder is rotated 90° and
replaced on the comparator. The points are again measured and their readings
are recorded against point number. The operation is completed when the plate
has thus been measured in all four positions.
Despite the fact that the plate is measured in four positions, the total
measuring time is about the same as that required when double settings are performed
on a conventional two screw comparator. This is attributable mainly to two factors:
(a) each setting involves only a single radial bisection, rather than bisection in
two directions; (b) slewing is very rapid, for the microscope can be moved into
measuring position from any point onthe plate to any other point in a matter of
about five seconds. An experienced operator can perform the complete measurement
of a plate containing 30 images within one hour; when double settings are required
(i.e., a total of 8 measurements per point), the time is increased to about 90
minutes. With automatic digital readout these times are about halved.
CALIBRATION
A systems analysis of the comparator shows that aside from stability of the
plate during measuring, only three elements of the system are critical to the
attainment of the desired measuring accuracy of one micron. They are the scale,
the screw and the pivot. All other elements require tolerances from one to two
orders of magnitude less demanding. For example, for one micron accuracy the
linearity of the translation of the microscope need be good only to about +300
microns (actually, it is ten times better than this). Likewise, the axis of the
microscope need remain parallel to itself only to within 40:6 (again, the actual
tolerance is more than ten times better than this). Similarly, since the scale is
translated by at most one millimeter, the direction of the translation must be
parallel to the axis of the scale only to within 48^, a tolerance that is easily
bettered by a factor of one hundred.
The scale is indeed a critical item, for each measurement will inherit the
error of the graduation to which it is referred. This means that, in the absence of
other errors, one micron accuracies demand a scale that is either accurate to one
micron or else is calibrated to an accuracy of one micron. The scales employed in
the production models of the comparator are manufactured to the following
specifications: cumulative nonlinearity of spacing is not to exceed one micron