ibul 2004 
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Section y-z with 3D micro-measurement methods 
—SIS-AFM 
—-CLSM 
RE - Profilometry 
2000 CRAS ui MER. 
1000 de 
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z [nm] 
-4000 -3000 
   
  
-2000 
y [nm] 
Figure 6. Profile plot of the calibration object by correlative 
3D micro-range measurement methods: AFM (grey), CLSM 
(orange), profilometer (green). 
While lateral and vertical analysis of the reflection mode 
CLSM measurements do fit quite well, the reflection artefacts 
of the measurement method at the pyramids edges can be 
clearly seen. Lateral laser profilometry results are in good 
agreement to the AFM reference. Though, in vertical 
direction, a discrepancy of about 10% in height can be 
stated. The reason for this difference is not yet clear and has 
to be further investigated. 
6. DISCUSSION AND OUTLOOK 
With a new versatile calibration object we have been able to 
calibrate scanning electron microscopes at high 
magnification within certain limits of accuracy. The results 
are very promising and the calibration object and the 
method will be further optimized. Additionally, it should be 
possible to apply the 3D micro-object for calibration of 
confocal light scanning microscopes. The nanomarker radius 
could be altered, so that the reference points lie within the 
resolution limits. Eventually, a bigger gap between the 
single pyramidal steps will prevent scattering artefacts in 
the CLSM data. 
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8. ACKNOWLEDGMENTS 
We kindly want to acknowledge the help from Dipl.-Ing. 
Thorsten Dziomba Dr. Ludger Koenders, Pysikalisch- 
technische Bundesanstalt, Braunschweig, Germany for high- 
precision AFM measurements and fruitful discussions. We 
also want to thank Dr. Roger Wepf, Dr. Sonja Wessel, and 
Sonja Page!, Analytical Microscopy, Beiersdorf AG, 
Hamburg, Germany for CLSM (Leica, Bensheim, Germany) 
and Profilometer (Nanofokus. Oberhausen, Germany) 
measurement and FEI, Eindhoven, Netherlands for FIB time.