mechanical grinding and polishing 
final step 
mechanical chemical physical 
treatment treatment treatment 
@ 2 } . } 
| 2. = chemical ion beam 
vibratory a 3. polishing polishing 
| polishing © © | > plasma 
20 | slight || © cleaning 
‚5535| etching || ZZ annealing 
— a 0 -- a 
Fig. 6: Preparation strategies for EBSD 
Conclusion 
EBSD as a method with very low information depth requires adjustment of the standard preparation 
procedures in order to remove any residual distortion on the prepared surface. On the other hand, 
this technique can be used as quality control for specimen preparation and help to improve it. 
Acknowledgements 
The authors thank to the Struers company for providing the LaboPol 4/LaboForce 1 polishing 
machine and also to all Struers coworkers who supported them with helpful advice regarding the 
preparation procedures. 
References 
[92Kri] Krieger Lassen, N.C.; Juul Jensen, D.; Conradsen, K.: Image Processing Procedures for 
Analysis of Electron Back Scattering Patterns, Scanning Microscopy 6 (1992) 115 
[93Joy] Joy, D. C.: Scanning Electron Microscopy, in Materials Science and Technology 2A, 
eds. Cahn, R.W.; Haasen, P., VCH (1993) 221 
[94War] Wardle, S.T.; Lin, L.S.; Cetel, A.; Adams, B.L.: Orientation Imaging Microscopy: 
Monitoring Residual Stress Profiles in Single Crystals Using an Image Quality 
Parameter, 1Q, Proc. MSA’94, New Orleans (1994) 680 
[98Ren] Ren, S.X.; Kenik, E.A.; Alexander, K.B.; Goyal, A.: Exploring Spatial Resolution in 
Electron Back-Scattered Diffraction Experiments via Monte Carlo Simulation, Microsc. 
Microanal. 4 (1998) 15 
[98TSL] TexSEM: OIM Data Collection User Manual (1998) 
[99Gee]  Geels, K: The True Microstructure of Materials: Materialographic Preparation from 
Sorby to the Present, Microstr. Sci. 26 (1998) 195 
[99Pet] Petzow, G.: Metallographic Etching, 2". Ed., ASM International, Ohio (1999) 
[00Kat] Katrakova, D.; Miicklich, F.; Damgaard. M.J.: Specimen Preparation for EBSD, to be 
published 
358