48 Prakt. Met. Sonderband 52 (2018)
3.1 Chemical composition
The chemical composition of multinary thin films can be determined using EDX in the SEM a
with an accuracy of about 1 at.%. EDX measurements of materials libraries prove that "© !
complete ternary composition spreads can be fabricated in a single experiment [8] as well ¥ )
as large fractions of quaternary [9] and quinary [10] composition spaces. However, EDX We
cannot be used for light elements. Further methods such as RBS, NRA, and XPS have to “oo
be applied to determine the composition of multinary thin films containing light elements. All es:
of these methods can be performed in high-throughput. EDX measurement time for a a
materials library with 342 measurement areas is about 8 hours. For the high-throughput Sir
determination of Li-content in thin film materials libraries a combination of EDX, RBS and
NRA (Deuteron-induced gamma emission) was developed [11]. Combining this approach /
with thickness measurements allows mapping the density values of samples from the 194
materials library.
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3.2 Phase analysis ig
ims
The analysis of the phases in the multinary films is mainly performed by XRD. Measurement 1606:
time for a materials library with 342 measurement areas is about 8 h for modern instruments mic
equipped with a microfocus source and an area detector. The X-ray beam can be confined
to about 1 mm?2, which is big enough to yield sufficient signal for high-throughput
characterization and not averaging over too large compositional spreads (typical gradients 134
are on the order of 1 at.%/mm). The phase analysis of hundreds of diffractograms is
challenging and requires special software tools [12 - 13]. [he 0
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ory
3.3 Functional properties which
ane
The analysis of the functional properties in the muitinary films is performed by different uc
methods, some of them commercially available, some of them not. In the latter case custom-
built test-stands are used. A modular high-throughput test-stand [14] is used to perform
temperature-dependent (-20°C to 250°C) high-throughput measurements of electrical,
magnetic, magneto-electric, and magneto-optical properties, see Figure 2.
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Fig. 2: a) Photo of a high-throughput test-stand for mapping temperature-dependent
properties (electrical, magnetic) of multinary thin-film materials libraries; b) four four-point
probes measuring a thin film library fixed on a temperature-controlled chuck.