50 Prakt. Met. Sonderband 52 (2018) 
3.3.5 Phase transformation properties (shape memory alloys) 300 
The high-throughput characterization of materials showing reversible phase ne ¢ 
transformations, e.g. shape memory alloys (SMAs), can be performed using temperature- ne 
dependent resistance measurements, R(T), as well as measuring the curvature changes of fe: 
coated cantilevers, i.e. temperature-dependent thin film stress changes. From R(T) pi 
measurements the phase transformation temperatures, hysteresis width and the shape of ir 
the hysteresis can be determined [e.g. 8 — 9, 28]. This method was used e.g. to identify i 
SMAs with extremely small hysteresis width [29, 9] and to verify a theory on martensitic wo 
transformations [9]. Using micro-hotplates the processing and in situ characterization of 
materials showing phase transformations can be performed [30]. Next to alloys, shape he 
memory effects can also be found in thin-film oxides like VO2, and R(T) and temperature- 
dependent stress measurements were used to investigate the influence of a third element, J ACH 
e.g. W, on the phase transformation properties [31]. The cantilever array wafer method is 
also suitable for the characterization of the stress changes associated with hydrogen uptake hg 
and release in metallic thin films and can be thus used for investigating hydrogen storage Rie 
materials [32 - 33]. $5(K 
3.3.5 Miscellaneous properties 
Further high-throughput characterization methods for thin films have been developed. The 
fatigue properties of thin films can be measured based on a resonating coated cantilever 
principle [34]. For the development of new thermoelectric materials, it is necessary to 
determine the Seebeck coefficient as well as electrical and thermal conductivity in high- 
throughput [35 - 36]. 
3.3 Multifunctional existence diagrams 
The acquired datasets enable materials discoveries and the efficient optimization of the new 
lead materials towards applications. The multidimensional datasets are the basis for 
multifunctional existence diagrams, comprising the correlations between composition, 
processing, (meta)stable phases, microstructure and properties. 
4 Accelerated in-depth characterization 
Additional to the above-mentioned high-throughput characterization methods, it is also 
necessary to develop accelerated methods for in-depth characterization. E.g., if a new 
material was identified by combinatorial synthesis and high-throughput characterization, the 
next step is to study in detail its properties. This usually is performed with highest resolution 
but relatively slow methods like transmission electron microcopy (TEM) and atom probe 
tomography (APT). Here, a new approach was introduced: Combinatorial processing 
platforms consisting of a chip of 36 tips, ready for APT and TEM, coated by an identical 
material of interest by combinatorial deposition. Using this approach, the phase stability and 
oxidation of a quinary alloy could be studied on the atomic scale in an accelerated manner 
[37 - 38].