UAE e cpm A | 
e 
_ 
  
N 
Anh 
e 
— 
— 
— 
VM 
  
  
     
  
  
  
  
  
  
  
  
  
     
FIGURE 11. Contour maps of Zeiss platen 
from super wide angle camera. 
a. without application of film-flattening 
vacuum (rms unflatness = 7.2 um) 
b. with application of film-flattening 
vacuum (rms unflatness = 11.6 um) 
  
c. difference between b and a. 
  
V 
| À 4.0 
| 6.0 > 
8.0 
C. 
TABLE 3. RMS fit of polynomials of various degree to measure- 
ments of spot heights of DBA and Zeiss platens. 
  
  
  
  
RMS Values of Residuals of Best Fitting Polynomials 
Degree DBA Reseau Platen Zeiss Platen 
Vacuum Off | ‚Vacuum On Vacuum Off | Vacuum On 
1 5.207 m 10.20 um 7.20 .um 11.58 um 
2 2.28 3.86 1.35 1.56 
3 2.13 3.72 1.32 1.44 
4 0.99 1.61 1.21 1.24 
( 5 0.81 1.44 : 1.19 1.17 
6 0.78 1.37 0.99 1.14 
  
  
  
  
  
„27-