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2. THE MULTISENSOR SYSTEM
The layout of the multisensor system is shown in Fig. 1. The system includes two main sub-systems: (i) a whole field
macro profilometer and (ii) a point-by-point scanning distance meter. The macro profilometer uses a liquid crystal
projector combined with a CCD camera. The scanning distance meter is based on a double-heterodyne absolute
interferometer (DHI) and on a galvanometric scanner which enables to cover the whole working space. The
measurements from the scanning device are combined with those from the macro profilometer in order to enhance the
overall performance in terms of ease of system calibration and of good profile reconstruction, also in the presence of
profile discontinuities such as fast slope changes. The two sub-systems are described in the following sections.
OBJECT
OBJECT UNDER REFERENCE
MEASUREMENT y
COMBINED SET-UP 7
7
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Fig. 1. Layout of the combined set-up for 3-D Fig. 2. Schematic layout of the whole field profilometer
profilometric measurements. DHI: absolute double
heterodyne interferometer; SC: optical X-Y scanner;
CCD: CCD-camera; LCP: liquid crystal projector.
2.1. The whole field profilometer
In Fig. 2 a schematic layout of the profilometer is presented. The system is based on the projection of a Ronchi grating
onto the object and on the observation, from a different perspective, of the pattern deformed according to the shape of
the object. Both the CCD camera and the projector are at distance L from plane FH, on which the object to be measured
is placed. This plane represents a reference for the profile measurement of the object. The projection and imaging units
are at distance d from each other, and W is the width of the illuminated area. The image of the deformed pattern is
acquired by a black and white video-camera and stored into a personal computer equipped with an advanced frame
grabber. The image resolution is 512x512 pixels with 256 gray levels. The height evaluation procedure of the
profilometer is based on two subsequent steps: in the first step, the grating deformed by the object and the reference
grating are both elaborated: a suitable algorithm (Tang et al., 1990) allows to evaluate the two corresponding phase
maps, which are then subtracted from each other, resulting in the relative phase map Ag(x,y). In the second step, the
phase Ag(x,y) is converted into the height z(x,y) by means of triangulation, based on the following equation:
Lpo(x, y) (1)
Ay 2nd-«po(x y)
2.2. The absolute distance meter
The absolute (i.e. non-incremental) distance meter is shown in Fig. 3. In contrast to a conventional interferometer,
which performs only displacement measurements, this set-up can be used to perform absolute distance
measurements. The system is based on a double heterodyne interferometer (DHI) using a pair of tunable
diode-pumped Nd:YAG lasers. As detailed in a previous paper, (Gelmini et al., 1993), by applying a suitable electronic
IAPRS, Vol. 30, Part 5W1, ISPRS Intercommission Workshop “From Pixels to Sequences”, Zurich, March 22-24 1995