Full text: Proceedings of the Symposium "From Analytical to Digital" (Part 2)

Estimated process parameters of all profiles 
and mean values of the process parameters 
Table 3 
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casa Vo 9v*0 eyo LL 3m 5332 ce) £€'0 ge I 90$*2- ¥3'0- 02'0 y 
4S°o- ce 0 09*0 Ot 
eet o- got Io 5 
29°00 G0°0 (A) e0'0 119 ££'O 8 
910-7 60'0 92°0 e€'o- LV'O L2°0 8G°0 L 
0L°0~ 21*9 6£*0 Ot'Oo- ¢0°0 9L,*'0 YL'O 9 
29° 0 04170 9v°0 9vt'0- $0*0 60'0 O£'o ce'o- 9gv'o- tL'O- LL ‘0 S 
L1€'0- vc'o £9'0- L**0- 14*0- TL'O £€'O £G'0 0¢%0~ l1$*'0- 60*0- vTO*0- v 
09*'0- £2^0 0S*0 LS*0- el*o- 2i1*0 SL*O €Z2'0 8t'o- e£*o- Gi*O- ec‘o ç 
85°0- 8L'0 06°0 Ly 0- $00 ¢L°0 ¢¢°0 LO'O e£* 0 96*0- £2*0 Lc'o- c 
665*'0- 8L°0 96*0 6v*'0- LL*O- OL'O 8¢°0 vt'O IL'O0- 2i'O- 90*0- OL'O L 
fo Ce Le Le Le fe Ce Le Ca La Ce Le 
SuasJoH KemaioN |puerddn pueTs] OHSTQ USTEPATII 
t0*O- L9°O- 80'0- 11°00 a2'0- st*o ce*N 09°'0 10°00 L9*0- S€*0- tt‘O- Ul 
$0'0- 09°0- 9 
12'O- 9p'O- Lo 04°0- eyo G 
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a 99°0- 20*0- £0'0- 22^0- 2l'0 Gc *0 é8'0 io 9L*0- LS’0- tt‘o- ç 
60°N LL'o- Gi'0~ 120 120" 9t*0 8£°0 L9°O pi*o- 09*0- LG°O- co e 
61°0 v9°0- zo*o- co^ 0- LO ^0- 9L°O 22:0 8¢°0 ¢2°0 oL'0~ GL‘O SG'0- 4 
Ce Le £e Ce Le £o Ce Le ‘a La Ce Le 
pueTuo) 3UTUSEM ueersnuog u2333] SUYOS IzonaouueH 
  
  
  
  
  
  
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