of replicas, since the original surfaces cannot be
examined directly. Evaporated silicon monoxide was
found to be capable of forming good replicas. The
surface of the replica was identified and located
by the deposition of & "decoration" of condensed
heavy metal particles formed by evaporation of a
small quantity of suitable metal in vacuum. Gold/
palladium wire wrapped round the tungsten filament
produced & suitable deposit of about 1 nm average
thickness, but with an open reticulated appearance
of à spacing around 15 nm.
The AEI EMÓG transmission electron microscope used
to produce the stereo pair micrographs was equipped
with a high tilt cartridge to maximize the stereo
effect. The exposures on glass plates were printed
on glass plates or high stability film and measured in
a simple folding mirror stereoscope (Hilger and Watts
SB180). Corrections were applied for the apparent
tilt caused by variation of magnification.
<æ- A
180nm
lr T= mr
TE er
wif d
ole, SET
OA LAT
LAA ART
TT T
fe eT Tm ET
= TZ
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Figure 25 Surface topography of three gold films by
stereo electron microscopy, (a) 40 nm,
(b) 29 nm, (c) 16 nm mean thickness.
Vertical scale expanded to emphasise the
relief.
Figure 25 shows the results of measurements on gold
films of three thicknesses and indicates that greater
surface undulation occurs with increased thicknesse
Sano, omen,
Ment Tee ee eee te
b je
pm
Figure 26 Groove shape of X-ray diffraction grating.
(a) Stereo electron microscopy
(b) "Talystep'
96
A typical groove profile is shown in Figure 26,
comparing the measurements made by the stereoscopic
technique with the profile indicated by the "Talystep"
profile measuring instrument. There is agreement in
the results, but it should be remembered that the
dimensions of the Talystep stylus limits the
resolution of detail at this scale.
Reference
15 Butler D W, "A stereo electron microscope
technique for microtopographic measurements",
Micron, 1973, 4, pp 410-424.
Conclusion
In this paper, ten examples of unconventional imaging
techniques used for measurement purposes have been
briefly described. They serve to show possible ways
in which photogrammetry has been extended, or ways of
making use of the existing techniques of
photogrammetry in these fields.