Analysın 
Vatend! 
Af, Maz 
Abstract 
; ! Materials) 
Fig. 3: SEM micrographs (45° tilt), surface of alloy 2024 after different nitriding times in Ar/H, (5:1) atmos- x we 
phere: 0.5 h (a,b) and 2 h (c) GENES 
Esper 
= m nanomei! 
a of & ~0— AN, : 
2 oh ier 
7 . RO ArH, INH order tO 1 
FIT ie 
Si were Gew 
= 20} ARTE 
10 } 
5 | ~~ 
I. rtd edt 
noo ail [ntroduc 
sputtering time [min] —— Poros 
Fig. 4: AES nitrogen depth profi- Fig. 5: SEM micrograph (45° tilt), Fig. 6: TEM cross-section showing applicatior 
les of nitrided (2 h) A199.5 in de- surface of Al99.5 after sputtering a coarse cone after the same sam- a higher € 
pendence on gas admixture du- and nitriding (2h) without H, ple treatment as in fig. 5 properties 
ring sputter cleaning / nitriding admixture at each process step 5 ı A 
at the surface. In fig. 6 is shown that these coarse cones are formed by growing of aluminium out wih a = 
from the substrate during first treatment step. The surface of coarse cone will be likewise nitrided Pk E 
during second step. The metallic core of the cone in fig. 6 contains dislocations seen as dark lines. SONO 
centrifuga 
For the | 
4 Conclusions molecules 
Detailed information has been obtained to the chronology of the sputter cleaning process and to mi- a 
crostructural effects during sputtering and nitriding. In combination with results from in-situ plasma lhe Suppe 
examinations the influence of main treatment parameters has been clarified. oe 
the layer 
qr 
fe direc 
References Qari 
(1) Stock, H.-R., Quast, M., Mayr, P.: Harterei-Technische Mitteilungen 53 (1998) 322 
(2) Podlesak, H., Faust, U., Wielage, B., Quast, M., Mayr, P., Stock, H.-R.: Mikrochimica Acta 133 
(2000) 285 Experin 
(3) Quast, M., Mayr, P., Stock, H.-R.: Surf. Coat. Technol. 120-121 (1999) 244 übe 
(4) Quast, M., Stock, H.-R., Mayr, P., Podlesak, H., Wielage, B.: Surf. Coat. Technol., submitted 0 a 
. . . : . og . Rng 
The results were achieved in cooperation with IWT Stiftung Institut fiir Werkstoffiechnik Bremen. . 
The authors are grateful to M. Quast, H.-R. Stock and P. Mayr for intensive collaboration. In addi- Theis 
tion, we acknowledge the support of Deutsche Forschungsgemeinschaft under grant number ben 
Wi688/34. I. 
166