34 Prakt. Met. Sonderband 46 (2014) 
compression samples with sizes between 1 um and 4 um fabricated by FIB on top of an particular from 
electrochemically prepared single crystal Mg[11-20] wedge. Bundesministe 
Forschungsfor 
Government, 
Standortagent 
appreciated. 
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[1]  Petch, | 
[2] Hall, E. 
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Fig. 7: a . [11] Richter 
ig. 7: Selected examples of miniaturized structures prepared by the aforementioned Ultrahic 
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[12] Dou, R 
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4. SUMMARY [13] Burek, 
: CL : i. : Mecha 
With the increasing trend in miniaturization, experimental determination of mechanical Nano L 
properties of miniaturized samples is getting increasingly important. Here we outline [14] Smolka 
different approaches that can be applied for pre-shaping or final shaping of miniaturized Novel t 
mechanical test specimens based on electrochemical etching, broad beam ion milling, and Rev. Sc 
FIB machining. Moreover, some selected applications are presented to show the [15] Volkert 
possibilities of the different methods. microm 
[16] Giannu 
for TEN 
5. ACKNOLWEDGEMENT [17] Moser, 
Motz, C 
The authors thank the organizers for the opportunity to present their work at the 14. Focuse 
Metallographic Conference 2014 in Leoben, Austria. Financial support by the Austrian [18] Ziegler 
Science Fond FWF (project numbers | 1020-N20 and P 25325-N20) is gratefully Matter 
acknowledaed. Further financial support by the Austrian Federal Government (837900) (in