48 Prakt. Met. Sonderband 52 (2018) 
3.1 Chemical composition 
The chemical composition of multinary thin films can be determined using EDX in the SEM a 
with an accuracy of about 1 at.%. EDX measurements of materials libraries prove that "© ! 
complete ternary composition spreads can be fabricated in a single experiment [8] as well ¥ ) 
as large fractions of quaternary [9] and quinary [10] composition spaces. However, EDX We 
cannot be used for light elements. Further methods such as RBS, NRA, and XPS have to “oo 
be applied to determine the composition of multinary thin films containing light elements. All es: 
of these methods can be performed in high-throughput. EDX measurement time for a a 
materials library with 342 measurement areas is about 8 hours. For the high-throughput Sir 
determination of Li-content in thin film materials libraries a combination of EDX, RBS and 
NRA (Deuteron-induced gamma emission) was developed [11]. Combining this approach / 
with thickness measurements allows mapping the density values of samples from the 194 
materials library. 
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16s: 
3.2 Phase analysis ig 
ims 
The analysis of the phases in the multinary films is mainly performed by XRD. Measurement 1606: 
time for a materials library with 342 measurement areas is about 8 h for modern instruments mic 
equipped with a microfocus source and an area detector. The X-ray beam can be confined 
to about 1 mm?2, which is big enough to yield sufficient signal for high-throughput 
characterization and not averaging over too large compositional spreads (typical gradients 134 
are on the order of 1 at.%/mm). The phase analysis of hundreds of diffractograms is 
challenging and requires special software tools [12 - 13]. [he 0 
EX 
ory 
3.3 Functional properties which 
ane 
The analysis of the functional properties in the muitinary films is performed by different uc 
methods, some of them commercially available, some of them not. In the latter case custom- 
built test-stands are used. A modular high-throughput test-stand [14] is used to perform 
temperature-dependent (-20°C to 250°C) high-throughput measurements of electrical, 
magnetic, magneto-electric, and magneto-optical properties, see Figure 2. 
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Fig. 2: a) Photo of a high-throughput test-stand for mapping temperature-dependent 
properties (electrical, magnetic) of multinary thin-film materials libraries; b) four four-point 
probes measuring a thin film library fixed on a temperature-controlled chuck.