have been Table C4: Three frames
1, Ae
rrelation in % | Note V F|P| Co|Ch|AP|| © Ox Cy 57 Max. Correlation in %
\P-EO | AP-AP [um] || [mm] | [mm] | [mm] | AP-OP | AP-EO | AP-AP
31000 | 3| 1 | minl 21] 0 ||] 3.09 || 0.496 | 0.536 | 0.924
094 0.0 3 || 3.08 || 3.376 | 6.306 | 1.017 99.5 99.9 80.8
93.1 26.7 là 4 || 3.10 [15.911 | 6.333 | 1.019 | 99.6 | 998 | 983
9 || 1.26 || 16.286 | 8.144 | 1.035 99.1 99.7 97.8
100.0 3.1 | 31040 311 4 120] O || 3.24 || 0.332 | 0.328 | 0.773 :
100.0 17.9 1 9 || 1.30 || 1.098 | 0.829 | 0.803 94.6 99.6 98.8
100.0 26.2 32000 3 | 2 | min |33| O || 11.5 || 0.514 | 0.644 | 0.823
s 3 || 9.12 || 0.860 | 1.713 | 0.880 97.7 99.4 42.3
100.0 5.9 4 || 9.15 || 11.324 | 2.014 | 3.912 99.4 99.9 99.6
100.0 22.9 1 9 || 1.22 ||12.308 | 2.868 | 4.288 99.9 99.8 99.5
944 | 924 | 32040 | 3 | 2| 4 |32| 0 || 11.3 || 0.355 | 0.381 | 0.680
3 || 9.42 || 0.360 | 0.391 | 0.682 38.8 99.1 6.80
596 83 9 || 1.29 || 0.794 | 0.466 | 0758 | 944 | 995 | 99.1
S97 | 84.1 | 3
100.0 | 9.5
99.5 81.8 Table C5: Four frames, configuration 1
999 | 71.0
205 83.6 V F|C| P| Co|ChlAP|| Gp Ox Oy o7 Max. Correlation in %
98.2 89.6 [um] || [mm] | [mm] | [mm] | AP-OP | AP-EO | AP-AP
" 411000 | 4 | 1 | 1|min|21]| 0 ||] 3.36 || 0.437 | 0.486 | 0.879
3 || 3.29 || 1.104 |.2.038 | 0.901 98.4 99.6 47.5
4 || 3.31 || 5.210 | 2.217 | 0.960 99.4 99.6 96.3
9 || 1.64 110.466 | 9.644 | 0.944 99.1 99.7 98.9
411040 | 4 | 1 | 1 4 |20j O || 3.39 || 0.294 | 0.289 | 0.726
3 || 3.36 || 0.309 | 0.298 | 0.756 35.1 98.6 8.2
Correlation in % 9 || 1.67 || 0.708 | 0.701 | 0.740 | 88.8 99.5 98.7
AP-EO | AP-AP 412000 | 4 | 1 | 2 | min |33/ O || 9.71 || 0.454 | 0.591 | 0.767
3 || 8.89 || 0.571 | 0.914 | 0.800 89.2 97.2 13.1
99.9 0.0 9 || 1.57 || 1.234 | 1.150 | 0.918 90.7 96.8 84.2
- - 412040 | 4 | 1 | 2 | 4 |32| O || 9.61 || 0.320 | 0.335 | 0.633
957 115 9 || 1.60 || 0.446 | 0.410 | 0.653 78.0 97.6 96.0
99.8 98.4
100.0 30.2
98.8 88.5
96.4 6.8
99.7 99.5
96.8 95.3
98.5 95.2
31
