rtho- 
| then 
ea 
s in 
ould 
la- 
peed 
ulated 
ce of 
all 
tions. 
nsive, 
de- 
bility 
be 
or 
ing 
ube 
WS 
am 
1%. 
in 
cle is 
els 
photo pixel location 
-——y displacement residual 
  
  
  
  
  
  
  
  
  
  
  
* 
* [LS "IPIE 
Nr MEN. 
  
  
  
  
  
  
  
  
  
  
  
  
  
  
NN f 
: | 
Hs. STAGE SCAN PATH 
stage location 
when pixel a 
is sampled 
  
  
H»— — —— X displacement residual 
  
  
> ———————equal sampling increments 
Residual Displacements - the difference between the stage 
position and photo coordinates at the time of pixel sampling. 
  
focus coil deflectable electron image 
      
  
deflection coils 
  
    
photocathode ,— electron multiplier 
8 Image Dissector Tube - a Photomultiplier with an addressable 
scan aperture. 
65